Small Single Target Magnetron Sputtering Coater
Technical Parameters:
This set of configuration uses a quartz vacuum chamber, and the coating process is omnidirectionally visible, which is convenient for experimental observation and recording. The chamber design is easy to open and clean, and is very suitable for laboratory use. At the same time, the equipment is equipped with a rotating heating sample table, which can effectively improve the uniformity of the film and the quality of the film. The whole machine adopts a modular design, with simple operation logic and intuitive operation interface, which is easy to use.
| Small Single Target Magnetron Sputtering Coating Instrument | ||
| Product Model | KS-MST180 | |
| Sample table | Dimensions | φ100mm |
| Vibration frequency | 20 Hz-20000Hz | |
| Magnetron target gun | Equipped with a two-inch magnetron target, target size: diameter 50mm, thickness ≦ 3mm | |
| Vacuum chamber | Cavity Size | φ180mm X 200mm |
| Bbservation window | Omni-directional transparency | |
| Cavity Material | high purity quartz | |
| Opening mode | upper cover removable type | |
| Vacuum system | Front pump | low noise bipolar rotary vane pump |
| Molecular pump | low noise high pumping speed turbo molecular pump | |
| Vacuum measurement | compound vacuum gauge, range: 10-5~105Pa | |
| Air extraction interface | KF40 | |
| Exhaust interface | KF16 | |
| System vacuum | 1.0 × 10-4Pa | |
| Power supply | AC 220V 50/60Hz | |
| Pumping rate | molecular pump pumping speed 600L/s, pre-pump pumping speed 1.1L/s | |
| Power Configuration | Power supplies | One set of DC power supply |
| Output power | 300W | |
| Other parameters | Supply voltage | AC220V,50Hz |
| Overall machine power | 2kW | |
| Overall size | 550mm X 350mm X1200mm | |
| Customizable | ||
Product Description: This equipment is a desktop-type quartz cavity single-target magnetron sputtering coating instrument, which can be used for the preparation of metal thin films. It has applications in the fields of electronics, optics, special ceramic preparation, etc., and can also be used for laboratory SEM sample preparation.
