KS Instrument Equipment

​​​​​​​​​​​​​​​​​​​​​One-stop Lab Equipment

Dual-target magnetron sputtering coating instrument

Model number  :KS-MSC-180S-DC/RF

 

​​​​​​​Application :The dual-target magnetron sputtering coating instrument can be used to prepare single-layer or multi-layer ferroelectric films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, polytetrafluoroethylene films, etc.

 

 

 

 

 

 

Plasma sputtering coating instrument i

Model number : KS-PSC-180Q-DC   

 

 Application scope: Can be used for metal sputtering coating, especially suitable for coating of metals such as gold, silver and copper.题-双击进行编辑

​​​​​​  Introduction : The laboratory plasma cleaning machine ionizes working gases such as argon, oxygen, and nitrogen through high-frequency electric fields or microwaves to form plasma. The high-energy particles in the plasma collide with the surface of the object to be cleaned, causing physical bombardment, which removes the contaminants on the surface. At the same time, the plasma also reacts chemically with the surface contaminants, generating volatile substances, thereby achieving surface cleaning.

5L plasma cleaner 500W/1000W

Oil-free Vacuum Pump

Main technical features

1.Reliable work

KS-SPX oil-free vacuum pumps in semiconductor, aerospace, petrochemical, food and medicine, electric power, energy, environmental protection, automotive, analysis and testing
Instruments and other industries on the production line perennial continuous operation, stable and reliable, for the industry production and scientific research users trust.

2.Performance

has no oil pollution to the pumping system, creating a clean vacuum environment;

Low noise, low vibration, low temperature rise, excellent sealing material performance, life of up to 5 years, reliable and 3.Durable;

Exhaust mechanism components do not contact each other, no friction, high efficiency; no return oil and water vapor, no fuel injection, energy saving and environmental protection;

limit pressure is as low as 1Pa, which can replace the oil rotary vane vacuum pump.

reasonable cost performance

4.Price, save purchase cost;

Moving parts without friction, low energy consumption, high quality and low price accessories, timely and reliable service, saving operating costs;

The final product quality is good, the finished product rate is high, the test index is accurate, and the production cost is saved;

Does not need cooling water and lubricating oil, does not need daily maintenance, saving labor costs.

 

Application areas

Application areas Industry Semiconductor Energy Petrochemical Food and Drug Scientific research Analysis test
Vacuum Encapsulated Storage    
Vacuum furnace      
Exhaust table    
Oven/freeze-drying  
Gas Recovery/Recirculation
Refrigeration/Vacuum of air conditioning pipeline          
Braking/Line vacuuming  
Laser Vacuum        
Molecular pump  
Process pre-vacuum    
Coating    
Leak detection  
Glove box    
Mass spectrometer        
Electron microscope        
High energy beam line/accelerator        
High vacuum test bench          
Sample Preparation        

 

Main parameters:

Model KS-SP1000 KS-SP600 KS-SP300 KS-SP150
Exhaust velocity l/s 16.6 8.7 4.3 2
l/min 996 522 258 120
m3/h 59.8 31.3 15.5 7.2
cfm 35.8 18.7 9.3 4.3
Limit vacuum degree Pa ≦ 1.0 ≦ 1.0 ≦ 2.6 ≦ 8.0
Torr ≦ 7.5×10-3 ≦ 7.5×10-3 ≦ 1.9×10-2 ≦ 6.0×10-2
mbar ≦ 1.0×10-2 ≦ 1.0×10-2 ≦ 2.6×10-2 ≦ 8.0×10-2
psi ≦ 1.4×10-4 ≦ 1.4×10-4 ≦ 3.8×10-4 ≦ 1.2×10-3
Noise value dB(A) ≦ 63 ≦ 63 ≦ 63 ≦ 57
Leakage rate (exhaust port and gas ballast valve closed) 1×10-5Pa·m3/s
Max./Exhaust pressure MPa 0.1 /0.13
Working environment temperature ℃/ 5~40/41~104
Maximum moisture handling capacity G/h 60 50
Motor Output power kW/hp 1.50/2.00 0.75/1.00 0.55/0.74 0.25/0.33
working voltage VAC 380/220 380/220 220 380/220 220 380/220 220
Speed rpm 1410
In/Exhaust port size mm KF40/16×2 KF40/16 KF25/16 KF25/16
Weight kg 52 36 32 18
Cooling method air-cooled
Other with gas ballast valve

 

 

Brief Introduction: the oil-free vacuum pump is composed of pump head, motor, base and so on. The pump head contains movable and fixed scrolls, crankshafts, seals, fans and pump casings. The scroll is composed of a circular plane and one or more involute spiral disk walls extending from it. The fixed scroll and the movable scroll constitute the basic pumping mechanism of the oil-free scroll vacuum pump. During the working process, the movable and fixed scrolls do not contact each other, and rely
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