Two-way Mass Flow Meter
Details:
Scope of application
1. Semiconductor Manufacturing
2. Vacuum coating equipment
3. Special material surface treatment
4. Gas control
5. Leak Detection System
6. Environmental testing and analysis equipment
7. Chemical, petrochemical, metallurgy, optical fiber, etc
Product Features
1. Choose a variety of gas mode
2.304 stainless steel pipe core, corrosion resistance
3. Stainless steel double card quick connector, convenient connection, no leakage
technical parameters:
| Function | Two-way mass flow meter |
| Proton flow controller | Working temperature: 5~45°C |
| Maximum pressure: 3x 106 Pa | |
| Accuracy: ± 1.5% FS | |
| Repeatability: ± 0.2%F.S. | |
| Flow Range: | |
| The way: 0~100 SCCM | |
| 2 way: 1~199 SCCM | |
| Note: Other flow ranges can be customized at an additional cost | |
| Input power | AC 220V/50Hz single phase |
| Power | 150W |
| Mechanical pressure gauge | Has a mechanical pressure gauge installed on the front panel and connected to the mixing tank |
| Range:-0.1~0.15 MPa (0.01 MPa/grid) | |
| Needle valve | 316 stainless steel |
| Ventilation pipe | Internal connecting pipe is 1/4 "stainless steel pipe |
| External vent pipe is 1/4 "PTFE pipe | |
| Mixing tank | Φ80X120mm |
| Globe valve and accessories | 316 stainless steel needle valve |
| Φ1/4 "stainless steel pipe | |
| Dimensions | 600mm(L) x 745mm(W) x 700mm(H) |
| Quality Certification | CE certification |
| Warranty period | One year warranty, life-long maintenance |
Brief introduction: Product features: 1. Choose a variety of gas methods; 2.304 stainless steel pipe core, corrosion resistance; 3. Stainless steel double card quick connector, convenient connection, no leakage.
